The TD series is a group of compact, low pressure 1/4 inch UHP diaphragm valves available in both surface mount and conventional designs. The surface mount design is available in both 1.125 and 1.5 inch configurations for both w-seal and c-seal substrates. Face seal and butt weld end connections are also standard in both conventional and block valve designs.

TD valves are standard with 5Ra surface finish and chromium-enriched surface finish from our proprietary electropolishing process. The TD series exceed the stringent requirements demanded from the global semiconductor industry concerning surface finish, chemistry, cleanliness and performance.

• These valves are diaphragm valves of Surface Mount type, and are compatible with 1.125 inch C-SEAL. Both manual and pneumatic valves in this series incorporate a compact actuator, which allows the valve to suit to fine line pitches.
• The manual valves are 90° open/close types, and capable of being equipped with a lock key for preventing mis-operations.
• TD Series has achieved 0.3 for Cv value that is still higher than that of our KD Series.
• The surface that comes in contact with gases is made rich in chrome, and achieved Cr/Fe>2.0. (SEP specification)
• Achieving Hv300 on the sealing surface, repeated detachability is further improved.