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Surface Mount Substrates: K1S Series - C-Seal (Licensed
by Celerity)
Overview
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KITZ SCT is a licensed manufacturer of the K1S Ultra High-Purity
Modular Substrates by Celerity Group Inc.
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Features
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The K1S design is the market leader in 1.125 surface mount
gas panel technologies. K1S utilizes c-seal technology to
provide a compact, leak free substrate that offers customers
reduced footprint, ease of maintenance and lower overall cost.
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Major Specifications
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All K1S substrates have been manufactured to the strict
specifications of Celerity Group Inc. and have been
verified by independent third part testing.
Major requirements include:
- Chromium oxide to iron oxide greater than 3:1 Per
SEMI F60-0301
- Sealing surface hardness greater than 300 Vickers,
Per ISO 6507
- 316L double melt material, Per SEMI F20
- Surface roughness of all wetted areas less than
5Ra, per ISO 4288
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