In the Semiconductor and Flat Panel Display tools, the important considerations for Wet-systems are similar to a gas delivery system; Ultra-High Purity and extended cycle life. KITZ SCT improved the FD Series to improve particle free operation and increase the mean time to failure (MTF). The new FCD Series also was designed as a more compact valve, meeting market needs of reduced size with increased performance. FCD Series has multiple features for tool applications such as open-close indicator, various types of end connections, and rotatable direction of air inlet port.

In addition, the FCD Valve Series partners with the TB Series PFA fusion weld fitting for a leak-free, compact piping system.

FCD Series: Valves up to 2-inch more		TB Series: Fusion weld fitting up to 1-inch more