The IVBH Series presents a unique line of vacuum valves that feature a heater built into the bellows capable of operation in tandem with the valve body thus enabling heating of both the bellows and the valve body with the valve in either open or closed position. While normally, hot valves are used for the purpose of preventing adhesion of Bi-products to the inner wall of the valve and the O-ring seal during such procedures as the Si3N4 process, valves previously available have been capable only of external heating of the valve housing without raising the temperature of the valve body and bellows. The valves presented here allow heating of both the exterior and interior, enabling free setting of the temperature of the valve body and the bellows up to a maximum 180°C. The bellows and the internal heater boast a superb degree of durability, having a life of over one million operations. A digital temperature controller and an open/close display magnetic proximity switch are offered as optional extras.

• High-temperature heating not only reduces build-up of contamination, but also results in dramatic reduction in the frequency of maintenance work
• Internal heating of the bellows enables separate internal and external temperature settings
• The internal heater is capable of operation in tandem with the valve body, thus making possible simultaneous heating of the valve body and the bellows with the valve in either open or closed position
• Ideal for processes such as metal etching and CVD
• Capable of connection to all types of connection flanges such as ISO-KF, JIS-VF, conflat rotational flanges and ISO-MF
• A connector may be attached to both the heater and the thermo-electrical twin cord