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Gate Valves: UXG Series and LG Series

Overview

KITZ SCT offers two types of Gate Valves for the semiconductor tool industry. These two designs dramatically cut down tool down-time and reduce particle generation. UXG Series—Hot-Gate Valve—eliminates the by-products from your chamber and gate valve. LG Series—Perfect "L" Motion—Gate Valve dramatically reduces particle generation from the Gate-Plate.

  
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Major Specifications
  UXG Series—Hot Gate Valves LG Series—Perfect "L" Motion
SEMI STD
(opening area size)

200mm & 300mm

300mm

Body Heater

Max 180°C

—

Internal Gate Heater

Max 180°C

—

O-ring

Kalrez, Chemraz(Oprion)

Dupra, Viton

Material

Body A5052
Gate-Plate A5052
Bellows AM350
Stem SUS316

Body A5052
Gate-Plate A5052
Bellows AM350
Stem SUS316

Actuation

0.4-0.7MPa

0.4-0.7MPa

Operation

1E-6Pa to 0.7MPa

1E-7Pa to 0.1MPa

Safety

Gate-Lock function
Position Sensor
Gate Position Indicator

Gate-Lock function
Position Sensor
Gate Position Indicator

Life Cycle

Over 1M cycle
(N2 Charge Internal test data)

Over 2M cycle
(N2 Charge Internal test data)


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